Nano and Micro Devices Center


The Nano and Micro Devices Center is a research center located at the University of Alabama in Huntsville. The center forms the backbone of nanotechnology research in the university. It operates a level 4 clean room as well as several other lab facilities.

Objectives

The objective of the center is to effectively integrate the expertise in electrical, chemical, and materials engineering, biology, chemistry and physics towards the development and research in the fields of micro electro-mechanical systems and nanotechnology.

Facilities

The center operates a clean room that is equipped with microfabrication machines that perform thin film deposition, photolithography, dry and wet etching, and metrology measurements. It also operates a dark room for wet etching, electroplating and porous silicon fabrication. The facilities are utilized by organizations based in north Alabama. The processes performed in such a clean room level may be classified into: