Journal of Vacuum Science and Technology Journal of Vacuum Science and Technology is a peer-reviewed scientific journal published in two parts, A and B , by the American Institute of Physics on behalf of the American Vacuum Society . It was established in 1964 and the editor-in-chief is Eray Aydil.History 1964–1982 Journal of Vacuum Science and Technology 1983–present Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 1983–1990 Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena 1991–present Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Part ''A'' A covers applied surface science , electronic materials and processing, fusion technology , plasma technology , surface science , thin films , vacuum metallurgy , and vacuum technology . According to the Journal Citation Reports , the journal has a 2015 impact factor of 1.724.Part ''B'' Part B covers vacuum and plasma processing of various materials, their structural characterization, microlithography , and the physics and chemistry of submicrometer and nanometer structures and devices. According to the Journal Citation Reports , the journal has a 2014 impact factor of 1.398.
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